Double sided leveler
Device for double-sided fitting of characters on the photomask and on the semi-conductor plate and illuminating the photosensitive material with ultraviolet light (350-450 nm).
Milena Rašlјić Rafajilović
milena@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
milena@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Device for laser production of masks and photolithography
The device is used for making masks and photolithography - direct drawing.
Milče Smilјanić
smilce@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
smilce@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Bonder with leveler
-"in-situ" alignment and character settings on substrates (x, y, z & θ),
-accuracy up to 2 μm,
-semi-automatic PC control and data acquisition,
- application of voltage up to 2.5 kV,
-bonding temperatures up to 560 °C,
- applied force up to 15000 N,
- self-regulating dry system for vacuuming, possible vacuum in the working chamber 10-6 mbar.
-quick cooling by establishing nitrogen flow, etc.
Žarko Lazić
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Scanning probe microscope - SPM and AFM TM
Intended for examination of surface morphology using scanning tunneling microscopy and atomic force microscopy.
Options: nanolithography, nanoindentation.
The device has the possibility of testing samples in liquids.
Maximum sample dimensions: 50 mm x 50 mm x 20 mm
Dana Vasilјević-Radović
dana@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
dana@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Microscope with scanning probe - AFM
Intended for examination of surface morphology using the atomic force microscopy method.
Options: nanolithography, nanoindentation, determination of magnetic and electrical properties of the sample.
The device has the ability to test samples in a controlled atmosphere, vacuum and in liquids. Maximum sample dimensions: diameter - up to 40 mm, height - up to 15 mm.
Danijela Ranđelović danijela@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Studentski trg 12-16
FT-IR Spectrophotometer
FT-IR 6700 is an infrared spectrophotometer with Fourier transform. It has the ability to measure transmission and ATR measurement. The wavelengths covered by the basic device belong to the near and mid-infrared region - from 350 cm⁻¹ to 13,500 cm⁻¹ (740 nm to 28.6 μm).
Katarina Radulović
kacar@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
kacar@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
FT-IR Microscope
The iN10 FT-IR miroscope is an innovative instrument with the ability to measure small samples (only a few micrometers) and has the ability to measure transmission, reflection, and ATR measurements. Using the CCD camera, we obtain an image in the visible part, and the IR detector allows obtaining the IR spectrum from the surface of the sample (min. 50 μm x 50 μm). A HgCdTe detector cooled by liquid nitrogen is included in the configuration.
Katarina Radulović
kacar@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
kacar@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Spectrum analyzer
Analysis of the spectrum of the electrical signal in real time (with a bandwidth of up to 15 MHz)
Frequency range: DC to 8GHz, Frequency Mask Trigger, DANL: -150 dBm/Hz (@1 GHz)
Input impedance: 50 Ω, Maximum allowed signal level at the input: +30dBm
Miloš Frantlović
frant@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
frant@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
"Lock-In" Amplifier
An instrument that enables the separation of signals in the presence of large noise and the measurement of clean signals over a wide range of frequencies and amplitudes.
Miloš Frantlović
frant@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
frant@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Programmable two-channel electronic pressure calibrator
Device for setting reference gas pressure for calibrating measuring instruments, measurement uncertainty 0.01%, ranges 0-2 bar, 0-16 bar and 0-100 bar
Miloš Frantlović
frant@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
frant@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Spinner
Device for applying thin layers of photoresist and other materials in a liquid state
Milena Rašlјić Rafajilović
milena@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
milena@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
"Glove box" system
It enables work in an argon atmosphere with control of the presence of moisture and oxygen.
Katarina Cvetanović
katarina@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
katarina@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Planetary mill
Planetary mill with container up to 80 ml. It is intended for fine grinding of smaller quantities of samples. for grinding different types of samples: pharmaceutical, metallurgical, mineralogical, chemical, biological samples, as well as soil samples. The maximum grinding fineness is 0.1 µm.
Jelena Stevanović
jelena@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
jelena@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Welding device
A high-precision welding machine with the ability to vary the intensity, uses micro-plasma to weld thin membranes of pressure transmitters. The possibility of fine adjustment of the output current from 0 to 50 A.
Bogdan Popović
bogdanp@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
bogdanp@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Cathodic sputtering device
Spattering of thin layers by RF and DC method.
Milija Sarajlić
milijas@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
milijas@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Diffusion furnaces with 6 heating elements, for planar technologies on Si
Processes in individual elements: diffusion of phosphorus admixture, diffusion of boron admixture (shallow and deep in separate tubes), wet or dry oxidation in an oxygen stream in a tube for Si n-type or in a tube for Si p-type, heating of diffused layers, all 6 heaters are uniform: temperature from 400 to 1400°C, useful diameter is 135 mm, heating zone is 200 mm with accuracy 0.5°C
Katarina Cvetanović
katarina@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
katarina@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Device for illuminating films and photographic plates
A device with a xenon lamp as a light source, by means of which the projected characters (given in the appropriate PC format) are directly transferred to the film or photographic plate
Žarko Lazić
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Automatic prober
Intended for automatic and manual measurement and characterization of semiconductor components with a diameter of up to 100 mm, simultaneous measurement in 42 points that enables the measurement of more complex components-integrated circuits, equipped with a stereo microscope with the ability to zoom, automatic movement in x and y direction with a minimum step of 10 μm.
Žarko Lazić
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Profilometer
Profilometer for measuring the thickness of thin films (up to 1 nm) as well as for measuring roughness in the field of microelectronic industry in metallurgical research, equipped with an electronic amplifier and an automatic recorder for registering the movement of the measuring needle and a monocular microscope with magnification up to 10x, adjusting the force of the measuring needle in the range from 10 to 300 μN.
Žarko Lazić
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
zlazic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Bonder
Bonding of Al wire to semiconductor components
Stefan Ilić stefan.ilic@nanosys.ihtm.bg.ac.rs
Studentski trg 12-16
Studentski trg 12-16