Group leaders: Žarko Lazić, Milče M. Smilјanić

The group deals with the fundamental concepts, design, fabrication and testing of structures, components, devices and systems. This includes concept, design and fabrication of MEMS and NEMS sensor and actuator chips, as well as the development of specific procedures in planar technologies and micromachining.

Topics

• MEMS sensors
• MEMS actuators
• Piezoresistive pressure sensors
  - MEMS low pressure sensor chip for elevated operating temperatures up to 300⁰C 
  - MEMS pressure sensor chip with built-in overpressure protection
• Multipurpose MEMS sensors based on Zeebeck effect
• Inertial sensors
• MEMS microreactors 
• Microactuators 
• Silicon PIN photodiodes