IHTM PLAVI
University of Belgrade
Institute of Chemistry, Technology and Metallurgy
National Institute of the Republic of Serbia

grb BUUniversity of Belgrade

Planar and MEMS technologies

Group leader: Vesna Jović

The group deals with the development and application of planar technologies, including photolithography, silicon oxidation and diffusion, thin film deposition, development and application of different methods of micro and nanofabrication including bulk and surface micromachining.

planarne mems

Topics

  • Planar technologies
  • Bulk and surface micromachining

Department of Microelectronic Technologies

  • CMT announces funding through EU FP7 REGPOT project REGMINA that ensured its reinforcement as a Western Balkan centre of excellence for micro and nanosystems Regmina FP7

  • CMT is accredited by Serbian Ministry of Education, Science and Technological Development as a center of excellence for microsystems and nanosystems.

  • CMT is ISO 9001 Certified.

Contact

centar za mikoelektronske tehnologije

Centre of Microelectronic Technologies

Address:
Njegoseva 12
11000 Belgrade
Offices and Labs:
Studentski trg 16/III,Belgrade
Phone: +381 11 2638 188
Fax:+381 11 2182 995
e-mail:
dana@nanosys.ihtm.bg.ac.rs