IHTM PLAVI
University of Belgrade
Institute of Chemistry, Technology and Metallurgy
National Institute of the Republic of Serbia

grb BUUniversity of Belgrade

Žarko Lazić

MEMS Lab Manager

 

 

 

 

Address:

Center of Microelectronic Technologies, Institute of Chemistry, Technology and Metallurgy,
University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia Telephone: +381 11 2630 757
Fax: +381 11 182 995
E-mail: zlazic@nanosys.ihtm.bg.ac.rs

Short biography:

Žarko Lazić was born in Belgrade, Serbia, in 1959. He received his BSc in electrical engineering from School of Electrical Engineering, University of Belgrade, Yugoslavia in 1984 (dipl.-ing. in engineering physics). He is engaged in the field of planar technology and semiconductor detectors where he is leading various processes of planar technology and development of methods for measurement and characterization of semiconductor devices. He published 40 papers, 5 of which in international science journals. Mr. Lazić is a researcher with the IHTM-CMT.

Professional Achievements:

Design and fabrication of IHTM commercial pressure sensors SP-6 and SP-12 installed in facilities of several companies: EPS (main electric power provider in Serbia), water supplies companies and Srbijagas (main gas provider in Serbia).
Design and fabrication of functional models of Phase Change Actuators.

Major Projects:

International:
2005 – 2008 Micro-nano cantilever based detection of small electromagnetic forces, SCOPES IB 7320-110923, Swiss National Science Foundation
2008 – 2011 Reinforcement of Regional Microsystems and Nanosystems Centre REGMINA, Proj. No. 205533, 7th Framework Programme, European Union
2013 – 2015 Phase Change Actuator, Scientific Partner ACMIT, Austria
2015 – now CellFOS-Optofluidic Platform, Scientific Partner ACMIT, Austria

National:
2003 – 2004 Microsystem and Nanosystem Technologies for Sensors and Optoelectronics, Proj. No. IT.1.04.0062.B, Ministry of Science and Environmental Protection, Republic of Serbia
2005 – 2007 Micro and Nanosystem Technologies, Structures and Sensors, Proj. No. TR-6151, Ministry of Science and Environmental Protection, Republic of Serbia
2008 – 2010 Microsystem, Nanosystem Technologies and Devices, Proj. No. 11027, Ministry of Science and Technological Development, Republic of Serbia
2011 – 2016 Micro and Nanosystems for Power Engineering, Process Industry and Environmental Protection MiNaSyS, Proj. No. TR-32008, Ministry of Education, Science and Technological Development, Republic of Serbia

Major Publications:

Journal papers:

  1. M. M. Smiljanić, V. Jović, Ž. Lazić, “Maskless convex corner compensation technique on a (100) silicon substrate in a 25 wt % TMAH water solution”, Journal of Micromechanic and Microengineering Vol. 22, No. 11, 2012  DOI:10.1088/0960-1317/22/11/115011
  2. M.M. Smiljanić, B. Radjenović, M. Radmilović-Radjenović, Ž. Lazić, V. Jović, “Simulation and experimental study of maskless convex corner compensation in TMAH water solution”, Journal of Micromechanic and Microengineering Vol. 24, No. 11, 2014 doi:10.1088/0960-1317/24/11/115003

Conference Proceedings and Papaers:

  1. Z. Đurić, M. M. Smiljanić, K. Radulović, Ž. Lazić, “Boron Redistribution During SOI Wafers Thermal Oxidation”, Proc. 25th Internat. Conf. on Microelectronics MIEL, Belgrade, 14-17 May 2006, vol. 1, pp. 333-336
  2. D. M. Todorović, B. Cretin, Y. Q. Song, M. M. Smiljanić, Ž. Lazić, K. Radulović, “Photothermal Vibration Spectra of Square Diaphragm with Boss for Low-Pressure Sensor”, Proc. 26th Internat. Conf. on Microelectronics MIEL 2008, Niš, Serbia, 11-14 May 2008, Vol. 2, pp. 325-328, ISBN 978-1-4244-1882-4
  3. Z. Đurić, I. Jokić, M. Frantlović, D. Ranđelović, D. Vasiljevic-Radović, M. M. Smiljanić, Ž. Lazić, “Fabrication and Characterization of AFM Golden Microcantilevers and Measurement of Small Electromagnetic Forces”, Proc. 26th Internat. Conf. on Microelectronics MIEL 2008, Niš, Serbia , 11-14 May 2008, Vol. 2, pp. 363-366, ISBN 978-1-4244-1882-4
  4. Z. Đinović, M. Tomić, L. Manojlović, Ž. Lazić, M. M. Smiljanić, “Non-contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry”, Proc. 26th Internat. Conf. on Microelectronics MIEL 2008, Niš, Serbia , 11-14 May 2008, , Vol. 2, pp. 321-324, ISBN 978-1-4244-1882-4
  5. Ž. Lazić, M. M. Smiljanić, M. Rašljić, I. Mladenović, K. Radulović, M. Sarajlić, D. Vasiljević-Radović, "Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au", Proc. 1st Conf. IcETRAN, Vrnjačka Banja, June 2 – 5, 2014, pp. MOI1.1.1-4, ISBN 978-86-80509-70-9, Best Section Paper Award: MO
  6. Ž. Lazić, M. M. Smiljanić, M. Rašljić, "Glass Micromachining with Sputtered Silicon as a Masking Layer", Proc. 29th International Conference on Microelectronics MIEL 2014, Niš, Serbia, May 12-15, pp. 175-178, ISBN 978-1-4799-5295-3